<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Handbook of wafer bonding</title>
  </titleInfo>
  <name type="personal">
    <namePart>Ramm, Peter</namePart>
  </name>
  <name type="personal">
    <namePart>Lu, James Jian-Qiang</namePart>
  </name>
  <name type="personal">
    <namePart>Taklo, Maaike M. V.</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">gw</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Weinheim</placeTerm>
    </place>
    <publisher>Wiley-VCH</publisher>
    <dateIssued>2012</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xxxi, 395 p. : ill. (some col.) ; 25 cm.</extent>
  </physicalDescription>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">edited by Peter Ramm, James Jian-Qiang Lu, Maaike M.V. Taklo</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Semiconductor wafers</topic>
    <topic>Handbooks, manuals, etc</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Bonding</topic>
    <topic>Handbooks, manuals, etc</topic>
  </subject>
  <identifier type="isbn">9783527326464 (hbk.)</identifier>
  <identifier type="isbn">3527326464 (hbk.)</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">UMP</recordContentSource>
    <recordCreationDate encoding="marc">121016</recordCreationDate>
    <recordChangeDate encoding="iso8601">20251125093831.0</recordChangeDate>
    <recordIdentifier source="KUKTEM">vtls000065105</recordIdentifier>
  </recordInfo>
</mods>
