@book{68915,
	author = {Symposium TT, "Microelectromechanical Systems--Materials and Devices V"  œd (2011 : and Albrecht, Tim.},
	title = {MEMS, bioMEMS and bioelectronics--materials and devices :},
	publisher = {Materials Research Society,},
	year = {2012},
	series = {MRS proceedings,},
	address = {Warrendale, Pa. :},
	note = {Contains proceedings of Symposia TT, II, and HH of the 2011 MRS Fall Meeting, held Nov. 28-Dec. 2, 2011, in Boston, Mass}
}