MEMS, bioMEMS and bioelectronics--materials and devices :  symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. / 
editors, Tim Albrecht ... [et al.]. 
 - Warrendale, Pa. :  Materials Research Society,  2012 
 - x, 221 p. :  ill ;  24 cm. 
 - MRS proceedings,  v. 1415  1946-4274 ; .
<br/><br/> Contains proceedings of Symposia TT, II, and HH of the 2011 MRS Fall Meeting, held Nov. 28-Dec. 2, 2011, in Boston, Mass 
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781605113920 hbk. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses<br/>Biotechnology--Congresses<br/>Bioelectronics--Congresses