01336nam a2200277 a 4500 vtls000075648 KUKTEM 20251125093845.0 131018t2011 pau f 001 0 eng d 9781605113920 hbk. 201905061531 AUTHORITY 201410011056 safura 201410011055 safura 201310181228 ida UMP TK7875 .S96 2011 Symposium TT, "Microelectromechanical Systems--Materials and Devices V" œd (2011 : Boston, Mass.) MEMS, bioMEMS and bioelectronics--materials and devices : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. / editors, Tim Albrecht ... [et al.]. Warrendale, Pa. : Materials Research Society, 2012 x, 221 p. : ill ; 24 cm. MRS proceedings, 1946-4274 ; v. 1415 Contains proceedings of Symposia TT, II, and HH of the 2011 MRS Fall Meeting, held Nov. 28-Dec. 2, 2011, in Boston, Mass Includes bibliographical references and indexes Microelectromechanical systems Congresses Biotechnology Congresses Bioelectronics Congresses Albrecht, Tim. 0 0 0 0 20000 20000 2019-09-04 280.70 0 TK7875 .S96 2011 0000087220 2019-09-04 00:00:00 1 280.70 2019-09-04 OPEN VIRTUA40 68915 68921 VTLSSORT0080*0200*0400*0900*1110*2450*2600*3000*4900*5000*5040*6500*6501*6502*7000*9992