TY  - BOOK
AU  - Albrecht,Tim
ED  - Symposium TT, "Microelectromechanical Systems--Materials and Devices V"  œd (2011 :
TI  - MEMS, bioMEMS and bioelectronics--materials and devices: symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. 
T2  - MRS proceedings,
SN  - 9781605113920 hbk.
PY  - 2012///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Biotechnology
KW  - Bioelectronics
N1  - Contains proceedings of Symposia TT, II, and HH of the 2011 MRS Fall Meeting, held Nov. 28-Dec. 2, 2011, in Boston, Mass; Includes bibliographical references and indexes
ER  -