Gettering and defect engineering in semiconductor technology XIV :  selected papers from the 14th International Biannual Meeting on Gettering and Defect Engineering in Semiconductor, (GADEST2011) : September 25-30, 2011, Loipersdorf (Furstenfeld), Austria) / 
 Gettering and defect engineering in semiconductor technology 14  GADEST 2011 
edited by W. Jantsch, F. Schaffler 
 - Durnten-Zuerich, Switzerland :  TTP,  c2011 
 - xii, 520 p. :  ill. ;  25 cm. 
 - Solid state phenomena ;  v. 178 .
 - Solid state phenomena ;  v. 178 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783037852323 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Congresses<br/>Getters--Congresses