TY  - BOOK
AU  - Jantsch,W.
AU  - Schaffler,F.
ED  - GADEST 2011
TI  - Gettering and defect engineering in semiconductor technology XIV: selected papers from the 14th International Biannual Meeting on Gettering and Defect Engineering in Semiconductor, (GADEST2011) : September 25-30, 2011, Loipersdorf (Furstenfeld), Austria) 
T2  - Solid state phenomena
SN  - 9783037852323
PY  - 2011///
CY  - Durnten-Zuerich, Switzerland
PB  - TTP
KW  - Semiconductors
KW  - Congresses
KW  - Getters
N1  - Includes bibliographical references and index
ER  -