Advanced mechatronics and MEMS devices / 
editor by Dan Zhang 
 - New York :  Springer,  c2013 
 - xi, 249 p. :  ill. (some col.) ;  24 cm. 
 - Microsystems ;  23 .
 - Microsystems ;  23 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781441999849 1441999841 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Mechatronics