00892nam a2200265 a 4500 vtls000071534 KUKTEM 20251125095348.0 130612t2013 nyua f b 001 0 eng d 9781441999849 1441999841 201402201155 jamie 201402201155 jamie 201306121439 ida UMP TK7875 .A38 2013 Advanced mechatronics and MEMS devices / editor by Dan Zhang New York : Springer, c2013 xi, 249 p. : ill. (some col.) ; 24 cm. Microsystems ; 23 Includes bibliographical references and index Microelectromechanical systems Mechatronics Zhang, Dan Microsystems ; 23 0 0 0 0 20000 20000 2019-09-04 413.99 0 TK7875 .A38 2013 0000081226 2019-09-04 00:00:00 1 413.99 2019-09-04 OPEN VIRTUA40 70639 70645 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*7000*8300*9992