TY  - BOOK
AU  - Zhang,Dan
TI  - Advanced mechatronics and MEMS devices
T2  - Microsystems
SN  - 9781441999849
PY  - 2013///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Mechatronics
N1  - Includes bibliographical references and index
ER  -