Technology evolution for silicon nano-electronics :  selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan / 
 Proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 
edited by Seiichi Miyazaki and Hitoshi Tabata 
 - Stafa-Zurich, Switzerland :  Trans Tech,  2011 
 - xi, 234 p. :  ill. ;  25 cm. 
 - Key engineering materials,  v. 470  1013-9826 ; .
 - Key engineering materials ;  v. 470 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783037850510 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoelectronics--Congresses<br/>Nanostructured materials--Congresses<br/>Metal oxide semiconductors--Congresses