<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Technology evolution for silicon nano-electronics</title>
    <subTitle>selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan</subTitle>
  </titleInfo>
  <titleInfo type="alternative">
    <title>Proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics</title>
  </titleInfo>
  <name type="conference">
    <namePart>International Symposium on Technology Evolution for Silicon Nano-Electronics (2010 : Tokyo Institute of Technology)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Miyazaki, Seiichi</namePart>
  </name>
  <name type="personal">
    <namePart>Tabata, Hitoshi</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">sz</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Stafa-Zurich, Switzerland</placeTerm>
    </place>
    <publisher>Trans Tech</publisher>
    <dateIssued>2011</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xi, 234 p. : ill. ; 25 cm.</extent>
  </physicalDescription>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">edited by Seiichi Miyazaki and Hitoshi Tabata</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Nanoelectronics</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Nanostructured materials</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metal oxide semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Key engineering materials ; v. 470</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">9783037850510 (pbk.)</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">UMP</recordContentSource>
    <recordCreationDate encoding="marc">130613</recordCreationDate>
    <recordChangeDate encoding="iso8601">20251125095410.0</recordChangeDate>
    <recordIdentifier source="KUKTEM">vtls000071789</recordIdentifier>
  </recordInfo>
</mods>
