TY  - BOOK
AU  - Miyazaki,Seiichi
AU  - Tabata,Hitoshi
ED  - International Symposium on Technology Evolution for Silicon Nano-Electronics
TI  - Technology evolution for silicon nano-electronics: selected, peer reviewed papers from the proceedings of the International Symposium on Technology Evolution for Silicon Nano-Electronics 2010, June 3-5, 2010, Tokyo Institute of Technology, Tokyo, Japan 
T2  - Key engineering materials,
SN  - 9783037850510 (pbk.)
PY  - 2011///
CY  - Stafa-Zurich, Switzerland
PB  - Trans Tech
KW  - Nanoelectronics
KW  - Congresses
KW  - Nanostructured materials
KW  - Metal oxide semiconductors
N1  - Includes bibliographical references and index
ER  -