NEMS/MEMS technology and devices :  selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / 
edited by Lynn Khine and Julius M. Tsai 
 - Durnten-Zurich :  Trans Tech,  2011 
 - x, 229 p. :  ill. ;  25 cm. 
 - Advanced materials research,  v. 254  1022-6680 ; .
 - Advanced materials research ;  v. 254 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783037851456 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoelectromechanical systems--Congresses<br/>Microelectromechanical systems--Congresses