01267nam a2200277 a 4500 vtls000071786 KUKTEM 20251125095410.0 130613t2011 sz a f 001 0 eng d 9783037851456 (pbk.) 201401281005 saini 201306131607 faiz UMP TK7875 .M384 2011 International Conference on Materials for Advanced Technologies (2011 : Singapore) NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai Durnten-Zurich : Trans Tech, 2011 x, 229 p. : ill. ; 25 cm. Advanced materials research, 1022-6680 ; v. 254 Includes bibliographical references and index Nanoelectromechanical systems Congresses Microelectromechanical systems Congresses Khine, Lynn Tsai, Julius M. Advanced materials research ; v. 254 0 0 0 0 20000 20000 2019-09-04 391.86 0 TK7875 .M384 2011 0000080650 2019-09-04 00:00:00 1 391.86 2019-09-04 OPEN VIRTUA40 70966 70972 VTLSSORT0080*0200*0400*0900*1110*2450*2600*3000*4900*5040*6500*6501*7000*7001*8300*9992