NEMS/MEMS technology and devices
selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore
International Conference on Materials for Advanced Technologies (2011 : Singapore)
creator
Khine, Lynn
Tsai, Julius M.
text
sz
Durnten-Zurich
Trans Tech
2011
monographic
eng
x, 229 p. : ill. ; 25 cm.
specialized
edited by Lynn Khine and Julius M. Tsai
Includes bibliographical references and index
Nanoelectromechanical systems
Congresses
Microelectromechanical systems
Congresses
Advanced materials research ; v. 254
9783037851456 (pbk.)
UMP
130613
20251125095410.0
vtls000071786