TY  - BOOK
AU  - Khine,Lynn
AU  - Tsai,Julius M.
ED  - International Conference on Materials for Advanced Technologies
TI  - NEMS/MEMS technology and devices: selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore 
T2  - Advanced materials research,
SN  - 9783037851456 (pbk.)
PY  - 2011///
CY  - Durnten-Zurich
PB  - Trans Tech
KW  - Nanoelectromechanical systems
KW  - Congresses
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -