@book{71073,
	author = {Symposium A, "Materials Issues in Novel Si-Based Technology and En, William G. and Materials Research Society.},
	title = {Materials issues in novel Si-based technology :},
	publisher = {Materials Research Society,},
	year = {2002},
	series = {Materials Research Society symposium proceedings ;},
	address = {Warrendale, PA :},
	note = {"Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi}
}