Materials issues in novel Si-based technology :  symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A. / 
editors, William G. En ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2002 
 - xi, 280 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 686 .
 - Materials Research Society symposium proceedings ;  v. 686 .
<br/><br/> "Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558996229 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon--Optical properties--Congresses<br/>Semiconductors--Materials--Congresses<br/>Integrated circuits--Materials--Congresses<br/>Logic circuits--Congresses<br/>Dielectrics--Congresses