symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A Symposium A, "Materials Issues in Novel Si-Based Technology (2001 : Boston, Mass.) creator En, William G. Materials Research Society Meeting (2001 : Boston, Mass.) text pau Warrendale, PA Materials Research Society 2002 monographic eng

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xi, 280 p. : ill. ; 24 cm. specialized editors, William G. En ... [et al.] "Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi Includes bibliographical references and index Silicon Optical properties Congresses Semiconductors Materials Congresses Integrated circuits Materials Congresses Logic circuits Congresses Dielectrics Congresses 9781558996229 (hbk.) UMP 120615 20251125095417.0 vtls000061969