TY  - BOOK
AU  - En,William G.
ED  - Symposium A, "Materials Issues in Novel Si-Based Technology
ED  - Materials Research Society.
TI  - Materials issues in novel Si-based technology: symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558996229 (hbk.)
PY  - 2002///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Silicon
KW  - Optical properties
KW  - Congresses
KW  - Semiconductors
KW  - Materials
KW  - Integrated circuits
KW  - Logic circuits
KW  - Dielectrics
N1  - "Papers presented at Symposium A, "Materials Issues in Novel Si-Based Technology," held ... at the 2001 MRS Fall Meeting"--P. xi; Includes bibliographical references and index
ER  -