MEMS :  fundamental technology and applications / 
edited by Vikas Choudhary, Krzysztof Iniewski 
 - Boca Raton, FL :  CRC Press,  c2013 
 - xxii, 456 p. :  ill. ;  26 cm. 
 - Devices, circuits, and systems .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781466515819 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microelectronic packaging