00689nam a2200205 a 4500001001400000003000700014005001700021008004100038020002500079040000800104245010100112260004000213300003500253490003500288504005000323650003500373650003000408700002100438700002400459vtls000077307KUKTEM20251125095427.0140407t2013    flua   f      001 0 eng d  a9781466515819 (hbk.)  aUMP00aMEMS :bfundamental technology and applications /cedited by Vikas Choudhary, Krzysztof Iniewski  aBoca Raton, FL :bCRC Press,cc2013  axxii, 456 p. :bill. ;c26 cm.0 aDevices, circuits, and systems  aIncludes bibliographical references and index 0aMicroelectromechanical systems 0aMicroelectronic packaging1 aChoudhary, Vikas1 aIniewski, Krzysztof