TY  - BOOK
AU  - Choudhary,Vikas
AU  - Iniewski,Krzysztof
TI  - MEMS: fundamental technology and applications 
T2  - Devices, circuits, and systems
SN  - 9781466515819 (hbk.)
PY  - 2013///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes bibliographical references and index
ER  -