Mönch, Lars <br/><br/>
Production planning and control for semiconductor wafer fabrication facilities :  modeling, analysis, and systems / 
Lars Mönch, John W. Fowler, Scott J. Mason 
 - New York :  Springer,  c2013 
 - xii, 288 p. :  ill. (some col.) ;  24 cm. 
 - Operations research/computer science interfaces series ;  vol. 52 .
 - Operations research/computer science interfaces series ;  vol. 52 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781461444718 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Semiconductor wafers--Design and construction<br/>Production planning