00967nam a2200241 a 4500001001400000003000700014005001700021008004100038020001800079040000800097100001800105245016600123260003300289300004600322490007000368504005000438650004400488650005000532650002400582700002900606700002000635830007000655vtls000070724KUKTEM20251125095528.0130605t2013    nyua   f      001 0 eng d  a9781461444718  aUMP1 aMönch, Lars10aProduction planning and control for semiconductor wafer fabrication facilities :bmodeling, analysis, and systems /cLars Mönch, John W. Fowler, Scott J. Mason  aNew York :bSpringer,cc2013  axii, 288 p. :bill. (some col.) ;c24 cm.1 aOperations research/computer science interfaces series ;vvol. 52  aIncludes bibliographical references and index 0aSemiconductorsxDesign and construction 0aSemiconductor wafersxDesign and construction 0aProduction planning1 aFowler, J. W.q(John W.)1 aMason, Scott J. 0aOperations research/computer science interfaces series ;vvol. 52