01205nam a2200289 a 4500 vtls000070724 KUKTEM 20251125095528.0 130605t2013 nyua f 001 0 eng d 9781461444718 201402201411 saini 201306051449 irma UMP TK7871.85 .M66 2013 Mönch, Lars Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems / Lars Mönch, John W. Fowler, Scott J. Mason New York : Springer, c2013 xii, 288 p. : ill. (some col.) ; 24 cm. Operations research/computer science interfaces series ; vol. 52 Includes bibliographical references and index Semiconductors Design and construction Semiconductor wafers Design and construction Production planning Fowler, J. W. (John W.) Mason, Scott J. Operations research/computer science interfaces series ; vol. 52 0 0 0 0 20000 20000 2019-09-04 535.60 0 TK7871.85 .M66 2013 0000081439 2019-09-04 00:00:00 1 535.60 2019-09-04 OPEN VIRTUA40 72268 72274 VTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*7000*7001*8300*9992