Production planning and control for semiconductor wafer fabrication facilities modeling, analysis, and systems Mönch, Lars creator Fowler, J. W. (John W.) Mason, Scott J. text nyu New York Springer c2013 2013 monographic eng
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xii, 288 p. : ill. (some col.) ; 24 cm. specialized Lars Mönch, John W. Fowler, Scott J. Mason Includes bibliographical references and index Semiconductors Design and construction Semiconductor wafers Design and construction Production planning Operations research/computer science interfaces series ; vol. 52 9781461444718 UMP 130605 20251125095528.0 vtls000070724