TY  - BOOK
AU  - Mönch,Lars
AU  - Fowler,J.W.
AU  - Mason,Scott J.
TI  - Production planning and control for semiconductor wafer fabrication facilities: modeling, analysis, and systems 
T2  - Operations research/computer science interfaces series
SN  - 9781461444718
PY  - 2013///
CY  - New York
PB  - Springer
KW  - Semiconductors
KW  - Design and construction
KW  - Semiconductor wafers
KW  - Production planning
N1  - Includes bibliographical references and index
ER  -