Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology / 
Marc J. Madou 
 - 3rd ed. 
 - Boca Raton, FL :  CRC Press,  c2012 
 - 3 v. :  ill. (some col.) ;  29 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications 
<br/><br/><label>ISBN: </label>9781420055115 (v.1) 1420055119 (v.1) 9781420055191 (v.2) 1420055194 (v.2) 9781420055160 (v.3) 142005516X (v.3) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Nanoelectromechanical systems<br/>Microfluidics