01397nam a2200325 a 4500 vtls000046986 KUKTEM 20251125095529.0 100705t2012 flua f 001 0 eng d 9781420055115 (v.1) 1420055119 (v.1) 9781420055191 (v.2) 1420055194 (v.2) 9781420055160 (v.3) 142005516X (v.3) 201412041503 zairi 201404221541 jamie 201404221538 jamie 201107132332 VLOAD 201007051656 shikin UMP TK7875 .M33 2012 f Madou, Marc J. Fundamentals of microfabrication and nanotechnology / Marc J. Madou 3rd ed. Boca Raton, FL : CRC Press, c2012 3 v. : ill. (some col.) ; 29 cm. Includes bibliographical references and index V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications Microelectromechanical systems Nanoelectromechanical systems Microfluidics 0 0 0 0 10000 10000 2019-09-04 343.75 0 TK7875 .M33 2012 f 0000084211 2019-09-04 00:00:00 1 343.75 2019-09-04 OPEN 0 0 0 0 10000 10000 2019-09-04 343.75 0 TK7875 .M33 2012 f 0000084212 2019-09-04 00:00:00 1 343.75 2019-09-04 OPEN v.2 0 0 0 0 20000 20000 2019-09-04 343.75 0 TK7875 .M33 2012 f 0000084136 2019-09-04 00:00:00 2 343.75 2019-09-04 OPEN v.2 0 0 0 0 20000 20000 2019-09-04 343.75 0 TK7875 .M33 2012 f 0000084213 2019-09-04 00:00:00 1 343.75 2019-09-04 OPEN v.3 VIRTUA40 72297 72303 VTLSSORT0080*0200*0201*0202*0203*0204*0205*0400*0900*1000*2450*2500*2600*3000*5040*5050*6500*6501*6502*9992