TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication and nanotechnology
SN  - 9781420055115 (v.1)
PY  - 2012///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Microfluidics
N1  - Includes bibliographical references and index; V. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
ER  -