Nano-tribology and materials in MEMS / Sujeet K. Sinha, N. Satyanarayana, Seh Chun Lim, editors - Berlin : Springer, 2013 - viii, 275 p. : ill. (some col.) ; 24 cm.

Includes bibliographical references and index

9783642369346


Tribology
Microelectromechanical systems
Nanotechnology