Nano-tribology and materials in MEMS /
Sujeet K. Sinha, N. Satyanarayana, Seh Chun Lim, editors
- Berlin : Springer, 2013
- viii, 275 p. : ill. (some col.) ; 24 cm.
Includes bibliographical references and index
9783642369346
Tribology Microelectromechanical systems Nanotechnology