TY  - BOOK
AU  - Sinha,Sujeet K.
AU  - Satyanarayana,N.
AU  - Lim,Seh Chun
TI  - Nano-tribology and materials in MEMS
SN  - 9783642369346
PY  - 2013///
CY  - Berlin
PB  - Springer
KW  - Tribology
KW  - Microelectromechanical systems
KW  - Nanotechnology
N1  - Includes bibliographical references and index
ER  -