TY  - BOOK
AU  - Kohli,Rajiv
AU  - Mittal,K.L.
TI  - Developments in surface contamination and cleaning: methods of cleaning and cleanliness verification 
SN  - 9781437778793 (hbk. : v. 6)
PY  - 2013///
CY  - Amsterdam
PB  - William Andrew
KW  - Surfaces (Technology)
KW  - Inspection
KW  - Surface contamination
KW  - Prevention
KW  - Particles
KW  - Measurement
KW  - Dust control
N1  - Includes bibliographical references and index
ER  -