Microelectronics to nanoelectronics :  materials, devices & manufacturability / 
editor, Anupama B. Kaul 
 - Boca Raton, FL :  CRC Press,  2013 
 - xxiii, 407 p., [32] p. of plates :  ill. (some col.) ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781466509542 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology<br/>Microelectronics<br/>Nanoelectronics