TY  - BOOK
TI  - Microelectronics to nanoelectronics: materials, devices & manufacturability 
SN  - 9781466509542
PY  - 2013///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Nanotechnology
KW  - Microelectronics
KW  - Nanoelectronics
N1  - Includes bibliographical references and index
ER  -