Van Zant, Peter <br/><br/>
Microchip fabrication :  a practical guide to semiconductor processing / 
Peter Van Zant 
 - 6th ed. 
 - a New York :  McGraw-Hill,  2014 
 - xxiii, 548 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780071821018 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction<br/>Integrated circuits industry--Management