Lithography :  principles, processes and materials / 
Theodore C. Hennessy, editor 
 - Hauppauge, NY :  Nova Science Pub.,  2011 
 - xii, 284 p. :  ill. (some col.) ;  26 cm. 
 - Engineering tools, techniques and tables Nanotechnology science and technology .
 - Engineering tools, techniques and tables .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781617618376 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography<br/>Microfabrication