00752nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079040000800097245008700105260004600192300004600238490004500284490004200329504005000371650002100421650002100442700002600463830004500489vtls000079580KUKTEM20251125095719.0140604t2011    nyua   f      001 0 eng d  a9781617618376  aUMP00aLithography :bprinciples, processes and materials /cTheodore C. Hennessy, editor  aHauppauge, NY :bNova Science Pub.,c2011  axii, 284 p. :bill. (some col.) ;c26 cm.1 aEngineering tools, techniques and tables0 aNanotechnology science and technology  aIncludes bibliographical references and index 0aMicrolithography 0aMicrofabrication1 aHennessy, Theodore C. 0aEngineering tools, techniques and tables