TY  - BOOK
AU  - Hennessy,Theodore C.
TI  - Lithography: principles, processes and materials 
T2  - Engineering tools, techniques and tables
SN  - 9781617618376
PY  - 2011///
CY  - Hauppauge, NY
PB  - Nova Science Pub.
KW  - Microlithography
KW  - Microfabrication
N1  - Includes bibliographical references and index
ER  -