Costello, Suzanne <br/><br/>
Hermeticity testing of MEMS and microelectronic packages / 
Suzanne Costello, Marc P.Y. Desmulliez 
 - Boston, MA :  Artech House,  2013 
 - 195 p. :  ill. ;  24 cm. 
 - Integrated microsystems series .
 - Integrated microsystems series .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781608075270 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microelectronics<br/>Microelectromechanical systems--Testing<br/>Microelectronics--Testing