TY  - BOOK
AU  - Costello,Suzanne
AU  - Desmulliez,Marc P.Y.
TI  - Hermeticity testing of MEMS and microelectronic packages
T2  - Integrated microsystems series
SN  - 9781608075270
PY  - 2013///
CY  - Boston, MA
PB  - Artech House
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Testing
N1  - Includes bibliographical references and index
ER  -