@book{76260,
	author = {Nanoengineering: Fabrication, Properties, Optics, and Devices (Conference) and Campo, Eva M., and SPIE (Society)},
	title = {Nanoengineering: fabrication, properties, optics, and devices x :},
	publisher = {SPIE,},
	year = {[2013]},
	series = {Proceedings of SPIE,},
	address = {Bellingham, Washington, USA :}
}