Micromanufacturing engineering and technology / 
edited by Yi Qin 
 - 2nd ed. 
 - Waltham, MA :  William Andrew,  2015 
 - xliv, 814 p. :  ill. ;  24 cm. 
 - Micro & nano technologies series .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780323311496 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Manufactures<br/>Manufacturing processes<br/>Production engineering<br/>Microtechnology