TY  - BOOK
AU  - Qin,Yi
TI  - Micromanufacturing engineering and technology
T2  - Micro & nano technologies series
SN  - 9780323311496
PY  - 2015///
CY  - Waltham, MA
PB  - William Andrew
KW  - Manufactures
KW  - Manufacturing processes
KW  - Production engineering
KW  - Microtechnology
N1  - Includes bibliographical references and index
ER  -