Fundamentals techniques in microfabrication and nanotechnology / 
contributors, Guomin Jiang 
 - United Kingdom :  Auris Reference,  2015 
 - xi, 286 p. :  ill. (some col.) ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781781547007 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Manufacturing processes<br/>Microfabrication<br/>Nanotechnology