TY  - BOOK
AU  - Jiang,Guomin
TI  - Fundamentals techniques in microfabrication and nanotechnology
SN  - 9781781547007
PY  - 2015///
CY  - United Kingdom
PB  - Auris Reference
KW  - Manufacturing processes
KW  - Microfabrication
KW  - Nanotechnology
N1  - Includes bibliographical references and index
ER  -