00696nam a2200193 a 4500001001400000003000700014005001700021008004100038020002500079040000800104245015000112260004100262300004500303504005000348650002800398650002100426700001900447710003600466vtls000087490KUKTEM20251125102831.0150601t2015    xxka   f      001 0 eng d  a9781781547014 (hbk.)  aUMP00aMicrofabrication for industrial applications /ccontributors, Andres Garcia ... (et al.) ; edited and compiled by Auris Reference Editorial Board  aLondon, UK :bAuris Reference,c2015  aix, 254 p. :bill. (some col.) ;c24 cm.  aIncludes bibliographical references and index 0aManufacturing processes 0aMicrofabrication1 aGarcia, Andres2 aAuris Reference Editorial Board