Yamada, Isao <br/><br/>
Materials processing by cluster ion beams :  history, technology, and applications / 
Isao Yamada 
 - Boca Raton, FL :  CRC Press ,  2015 
 - xv, 244 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781498711753 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Materials--Effect of radiation on<br/>Ion bombardment<br/>Nanostructured materials<br/>Silicon--Effect of radiation on